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首页> 外文期刊>Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films >Neutral beam injector oxygen impurity measurements and concentration reduction via gettering processes
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Neutral beam injector oxygen impurity measurements and concentration reduction via gettering processes

机译:中性离子束注入器中氧气杂质的测量和通过吸气工艺降低浓度

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We have measured the reduction of oxygen impurity levels by means of gettering within the arc chambers of the TMX‐U neutral‐beam injectors using the TMX‐U neutral‐beam test stand. Our analysis incorporated silicon surface‐probe measurements and optical Doppler‐shift measurements of the hydrogen alpha spectra of deuterium atoms with energies appropriate for D2O parentage. Without gettering, the Auger electron spectroscopy analysis of an exposed silicon sample showed a large oxygen peak below the surface peak with a concentration equivalence of approximately 2% for an accelerated beam. After gettering, with either titanium or chromium getters, optical monochromator data indicated a reduction in the oxygen concentration of at least a factor of 10, whereas Auger spectroscopy data showed at least a factor of 8 reduction. Other metallic impurities remained below the level of detection even after gettering. Additional effects observed during this study include a change in the accelerated deuterium species concentrations, loss of gettering activity, loss of arc operation, and a change in arc performance due to arc chamber gas absorption during operation.
机译:我们已经通过使用TMX-U中性束测试台在TMX-U中性束注入器的电弧室内进行吸气来测量氧杂质水平的降低。我们的分析结合了具有D2O亲子关系的能量的氘原子氢α光谱的硅表面探针测量和光学多普勒频移测量。在没有吸气的情况下,对暴露的硅样品的俄歇电子能谱分析显示,在表面峰下方有一个大的氧峰,对于加速束,其浓度当量约为2%。用钛或铬吸气剂吸气后,光学单色仪数据表明氧浓度降低了至少10倍,而俄歇光谱数据表明降低了至少8倍。甚至在吸气后,其他金属杂质仍保持在检测水平以下。在这项研究中观察到的其他影响包括加速氘物种浓度的变化,吸杂活性的损失,电弧操作的损失以及操作期间由于电弧室气体吸收而引起的电弧性能的变化。

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