Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundary

摘要

Negative plasma potentials with respect to a grounded wall that was coated with a dielectric have been achieved in an electropositive plasma confined by a multidipole device. A Langmuir probe was used to measure the density and temperatures of the bi-Maxwellian distribution electrons and an emissive probe was used to measure the plasma potential profile near the plasma boundary. For many discharge parameters, the potential profile was that of a typical electropositive sheath, but it was shifted negative due to negative charge accumulated on the plasma-surface boundary. A virtual cathode was observed near the boundary when the neutral pressure, primary electron energy, and/or discharge current were low (∼2 × 10-4 Torr, ∼60 eV, and 80 mA, respectively). The behavior of the sheath potential was shown to be consistent with that predicted by particle balance and a qualitative mechanism for wall charging is presented.