Poisson's ratio and residual strain of freestanding ultra-thin films

摘要

The Poisson's ratio and residual strain of ultra-thin films (<100 nm) are characterized using the phenomenon of transverse wrinkling in stretched bridges. The test methodology utilizes residual stress driven structures and easy to replicate clean-room fabrication and metrology techniques that can be seamlessly incorporated into a thin-film production assembly line. Freestanding rectangular ultra-thin film bridges are fabricated using dimensions that generate repeatable transverse wrinkling patterns. Numerical modeling based on the non-linear Koiter plate and shell energy formulation is conducted to correlate the Poisson's ratio and residual strain to the measured wrinkling deformation. Poisson's ratio affects the peak amplitudes without significantly changing the wavelength of the wrinkles. By contrast, the strain affects both the wavelength and amplitude. The proof of concept is demonstrated using 65 nm thick copper films. A Poisson's ratio of 0.34 ± 0.05 and a tensile residual strain of (6.8 ± 0.8) × 10~(-3) are measured. The measured residual strain is in good agreement with the residual strain of (7.1 ± 0.2) × 10~(-3) measured using alternate residual stress-driven test structures of the same films.