Nanoindentation of polymeric thin films with an interfacial force microscope

摘要

The mechanical properties of interphase regions at bi-material interfaces can be quite different from the surrounding bulk materials. For composite materials, this interphase region is usually thin but plays an important role in their overall mechanical properties. Nanoindentation has become a commonly used experimental technique for measuring the mechanical properties of materials, especially when one of the dimensions is small. However, the extraction of reduced elastic modulus from the nanoindentation of thin films on substrates can pose challenges due to the influence of the substrate. In this study, the nanoindentation of thin films on substrates has been examined with a view to extracting the reduced modulus of thin polymer films. Thin films of (3-aminopropyl)triethoxysilane (C_9H_(23)NO_3Si, γ-APS) were deposited on silicon. An interfacial force microscope (IFM) was used to indent the γ-APS films. The effect of the substrate was studied by considering two very different thicknesses (4 μm and 46 nm). The nanoindentation data were analyzed via contact mechanics theories and a finite element analysis that incorporated surface interactions. The analyses showed that nanoindentation experiments can provide reliable values of film modulus when the film is very different from the substrate. It was found that the commonly used rule of thumb that the indentation depth should be less than 10% of the thickness did not eliminate substrate effects for a wide range of material combinations. Instead, it is proposed that the contact radius should be less than 10% of the thickness so that contact mechanics theories for monolithic materials can be used withouf considering the presence of the substrate. The modulus of γ-APS polymer films and the surface energy between the tungsten tip of the IFM and γ-APS films were extracted and were related to their cure. A completely cured 46 nm thick γ-APS film had a reduced modulus of 3.5+-0.5 GPa. This value falls in the usual range for polymers due to the amorphous nature of the γ-APS films.