Rational Vibration and Structural Dynamics Evaluations for Advanced Technology Facilities

摘要

This paper provides an overview of structural and mechanical vibration analyses for those responsible for the design and construction of micro-electronics and other advanced technology facilities. Analyses are based on the premise that individual system elements are dynamically related to one another. The dynamic characteristics of each component must be properly represented in a "total system" analytical model to depict realistic situations. The limitations of isolation techniques are discussed, especially with regard to computer-chip-manufacturing machines ("tools") and fans. Fan design resonant speed values are usually not available from the manufacturer and thus must be calculated and evaluated for adequacy. Easy-to-use displacement response vs. static stiffness plots are presented for use in preliminary design. These plots define criteria that facilitate optimizing floor framing structural systems and minimizing associated costs.