Development and Evaluation of On-Line Detection Techniques for Polar Organics in Ultrapure Water

摘要

An on-line monitor that can perform rapid trace detection of polar organics such as acetone and isopropanol in ultrapure water (UPW) is necessary to efficiently recycle water in semiconductor manufacturing facilities. The detection of these analytes is problematic due to their high solubility in water, resulting in low partitioning into sensor coatings for direct water analysis or into the vapor phase for detection by vapor phase analyzers. After considering various options, two conventional laboratory techniques have been evaluated: gas chromatography and ion mobility spectroscopy. In addition, optimizations of sensor coating materials and sample preconditioning systems were performed with the goal of a low-cost, chemical sensor system for this application. Results from these evaluations, including recommendations for meeting the needs of this application, are reported.