Experimental Research of DLC Film Deposited by Filtered Vacuum Arc Evaporation

摘要

Diamond-like carbon (DLC) films was grown successfully on silicon, titanium and high speed steel (HSS) substrate at low temperature in a filtered vacuum arc deposition system. Arc discharges were established on a graphite cathode in this home-built system with a torrid macroparticles filter. Ion current convicted by the plasma beam was measured with a negatively biased probe. I was shown that the magnetic field of the coils locked on the plasma duct has a strong influence on ion current. Scanning electron microscope (SEM), atomic force microscope (AFM) and Raman spectrum are sued to study the DLC film. Tribological behaviors of the deposited film are also studied.