Selective deposition and luminescence characterization of Eu-doped Y_2O_3 nanoparticles by microwave plasma synthesis

摘要

Nanosize phosphor particles of Eu-doped Y_2O_3 were synthesized at room temperature by an organometallic vapor-phase microwave plasma-synthesis technique. These particles were selectively deposited downstream of the plasma reaction region to form thin layers on biased regions of a substrate. Particles were characterized using x-ray diffraction and transmission electron micros- copy. The morphologies of the thin phosphor layers were studied using field-emission scanning elec- tron microscopy. Results indicate that the particles form a fibrous structure with good selectivity for thicknesses less than 100 nm.