Flexible AMOLEDs with low-temperature-processed TFT backplane technologies

摘要

Developments of backplane technologies, which are one of the challenging topics, toward the realization of flexible active matrix organic light-emitting diodes (AMOLEDs) are discussed in this paper. Plastic substrates including polyimide are considered as a good candidate for substrates of flexible AMOLEDs. The fabrication process flows based on plastic substrates are explained. Limited by the temperature that plastic substrates can sustain, TFT technologies with maximum processing temperature below 400 ℃ must be developed. Considering the stringent requirements of AMOLEDs, both oxide thin-film transistors (TFTs) and ultra-low-temperature poly-silicon TFTs (U-LTPS TFTs) are investigated. First, oxide TFTs with representative indium gallium zinc oxide channel layer are fabricated on polyimide substrates. The threshold voltage shifts under bias stress and under bending test are small. Thus, a 4.0-in. flexible AMOLED is demonstrated with indium gallium zinc oxide TFTs, showing good panel performance and flexibility. Further, the oxide TFTs based on indium tin zinc oxide channel layer with high mobility and good stability are discussed. The mobility can be higher than 20 cm~2/Vs, and threshold voltage shifts under both voltage stress and current stress are almost negligible, proving the potential of oxide TFT technology. On the other hand, the U-LTPS TFTs are also developed. It is confirmed that dehydrogenation and dopant activation can be effectively performed at a temperature within 400 ℃. The performance of U-LTPS TFTs on polyimide is compatible to those of TFTs on glass. Also, the performance of devices on polyimide can be kept intact after devices de-bonded from glass carrier. Finally, a 4.3-in. flexible AMOLED is also demonstrated with U-LTPS TFTs.