Sensor applications of thin-film devices originating in display technologies

摘要

Thin-film devices are widely utilized for flat-panel displays, and the essential advantages of the thin-film devices are generally large-area production, various-material substrate, layered structure, etc. Appropriate applications are flat-panel displays, and other applications where the abovementioned advantages are available and the disadvantages are acceptable are sensor applications. Moreover, if the sensor devices can be made by thin-film devices that have been already utilized for flat-panel displays, they can be made without additional cost. Therefore, thin-film devices are again promising for sensor applications especially for interactive displays. We are investigating sensor applications of thin-film devices. Particular in this journal paper, we review sensor applications of thin-film devices originating in display technologies. The various sensors are visible-light sensor, infrared-light sensor, temperature sensor, magnetic-field sensor, etc. Many research results from many research organizations as well as our research laboratory are introduced.