Thermodynamic analysis of Al-N, Al-NH_3 and Al-O-C-N systems for aluminum nitride powder production in a thermal plasma

摘要

The results of equilibrium composition and total enthalpy computation, in the temperature range of 1000 K to 6000 K and under a pressure of 1 bar, for Al - N, Al - NH_3 and Al-O-C-N systems are presented in this paper. These data enable temperature and energy parameters determination and optimization of the processes for ultrafine aluminum nitride powder production in thermal plasma.