Reactive plasma atomization of aluminum nitride powder

摘要

Experiments were performed to synthesize AlN powders by reacting Al with N using a conventional dc arc plasma as heat source. Feeding Al powder into Ar/N plasma open to atmosphere produced mainly Al oxide. Experiments using a chamber backfilled with nitrogen suppressed the Al oxide, but little AlN was formed. A furnace and crucible assembly was designed to feed molten Al directly into a DeLaval nozzle attached to the face of the dc arc plasma gun. Resulting submicron powders show a significant increase in AlN formation. This was dependent on chamber pressure, plasma velocity, and molten liquid feed rate. Experimental parameters, equipment design, effects of atomization/vaporiz ation/condensation are discussed.