DESIGN OF SOM FOR OPTO-ELECTRONIC DEVICE CHARACTERIZATION

摘要

A laser based Scanning Optical Microscope (SOM) has been designed and fabricated. As regards semiconductor device characterization the laser beam of the SOM is chopped by a mechanical chopper. This paper would carry out investigations of various performance char- acteristics such as relaxation time and diffusion length of opto-electronic devices like photo- diode, photo-transistor, LDR, p-n junction etc.