Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography

摘要

This paper discusses the results of a study of how the angles of incidence of rays of actinic radiation on the photomask surface affect the angular errors of circular optical scales (dials) in the operation of contact exposure during lift-off photolithography.