Mid-Infrared Nano-Antenna Technology

摘要

To improve the response of superconducting mid-infrared detectors, we have evaluated nano antennas. We developed a new fabrication process by using e-beam lithography to realize the nano-structures. Nano-antenna consists of a dipole antenna constructed with aluminum strips, and a niobium nitride (NbN) thin film which acts load resistance is placed in the antenna's center. In an evaluation of spectral transmission characteristics, clear absorption caused by antenna effects was observed at around 1,400 cm~(-1) (f=42 THz). The NbN thin film loads of the photo-detector showed good superconductivity.