Structural properties of TiO_(2)-WO_(3) thin films prepared by r.f. sputtering

摘要

TiO_(2)-WO_(3) thin films were prepared by radio frequency (r.f.) reactive sputtering from metallic target. Structural and morphological properties of the thin films have been studied through X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The influence of the annealing on the phase composition TiO_(2)-WO_(3) system was studied. The binding energies of titanium and tungsten are characteristic for Ti~(4+) and W~(6+). The influence of tungsten on anatase-rutile phase transition in TiO_(2) was observed. The structural modeling has been performed to account the preferred orientation in tungsten doped titanium oxide.