Band gap modified Al-doped Zn(1-x)Mg_xO and Zn_(1-y)Cd_yO transparent conducting thin films

摘要

Al-doped Zn(1-x)Mg_xO and Zn_(1-y)Cd_yO thin films were prepared on glass substrates by sol-gel method. The codoping thin films showed preferential c-axis orientation, and the lattice constant c evaluated from the shift of the position of (002) peak displayed an increasing evolution from x = 8 at.% to y = 8 at.%, indicating a roughly statistical substitution of Mg~(2+) and Cd~(2+) for Zn~(2+) in their solid solution. The effects of narrowing and widening band gap (Eg) on conductivity of (Cd, Al) and (Mg, Al) codoped ZnO thin films were simultaneously investigated using transmission spectra and electrical measurements. The trans-mittances of these films are obviously decreased by vacuum annealing to 50-60%. However, the carrier concentration and Hall mobility both increase, and resistivity decreases with narrowing band gap in 1 at.% Al-doped Zn(1-x)Mg_xO and Zn_(1-y)Cd_yO thin films from x = 8 at.% to y = 8 at.%. It is revealed that the conductivity of Al-doped ZnO thin films could be enhanced by this simple band gap modification.