Growth, characterization, and electrical properties of PbZr_(0.52)Ti_(0.48)O_3 thin films on buffered silicon substrates using pulsed laser deposition

摘要

Epitaxial thin films of PbZr_(0.52)Ti_(0.48)O_3 (PZT) were synthesized successfully on SrRuO_3/SrTiO_3/MgO/TiN/Si heterostructures by pulsed laser deposition. The films were single phase and had (001) orientation. The deposition parameters were varied to obtain the best epitaxial layer for each of the compounds. Transmission electron microscopy indicated good epitaxy for the entire heterostructure and sharp interfaces between the epilayers. Dielectric and P-E hysteresis loop measurements were carried out with evaporated Ag electrodes. The dielectric constant for the films was found to be between 400-450. The value of saturation polarization P_s was between 55-60μC/cm~2, and the coercive field E_c varied from 60-70 kV/cm. Integration of PZT films with silicon will be useful for future memory and micromechanical devices.