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A comparative study on as-deposited and in situ oxidized ZnO/diamondlike carbon (DLC) nanocomposite by pulsed laser deposition technique

机译:脉冲激光沉积技术沉积和原位氧化ZnO /类金刚石碳(DLC)纳米复合材料的比较研究

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摘要

As-deposited ZnO/diamondlike carbon (DLC) was prepared using the laser ablation technique on ZnO/C targets, and in situ oxidized ZnO/DLC was prepared by using the same technique, but with the presence of oxygen on Zn/C targets. Transmission electron microscopy showed that ZnO/DLC films were obtainable by using both methods, but only in situ oxidized ZnO/DLC films showed the ultraviolet absorption at ~370 nm. In situ oxidized films are highly sp~3-bonded and rougher than as-deposited films, but as-deposited films are mechanically harder, stiffer, and have higher adhesion strength than in situ oxidized films. X-ray photoelectron spectroscopy revealed that a lower fraction of SiC, but a higher fraction of sp~3 bonding was formed in the in situ oxidized ZnO/DLC. This hinted that the presence of oxygen might have scattered the plume's expansion and reduced the energy possessed by the ions, thus reducing the graphitization and the formation of SiC in DLC matrix. Hence, by altering the deposition mechanism during laser ablation, ZnO/DLC films with modified material properties can be tailored.
机译:使用激光烧蚀技术在ZnO / C靶材上制备沉积的ZnO /类金刚石碳(DLC),并使用相同的技术在氧化锌/ C靶材上存在氧气的情况下原位氧化制备ZnO / DLC。透射电子显微镜显示两种方法均可获得ZnO / DLC膜,但仅原位氧化的ZnO / DLC膜在〜370 nm处具有紫外吸收。原位氧化膜比原沉积膜具有更高的sp〜3键合度和更粗糙,但原位氧化膜比原位氧化膜在机械上更坚硬,更坚硬,并且具有更高的粘附强度。 X射线光电子能谱表明,原位氧化的ZnO / DLC中SiC的含量较低,而sp〜3键的含量较高。这暗示氧的存在可能分散了羽流的膨胀并降低了离子拥有的能量,从而减少了DLC基体中的石墨化和SiC的形成。因此,通过在激光烧蚀过程中改变沉积机制,可以定制具有改良材料性能的ZnO / DLC膜。

著录项

  • 来源
    《Journal of Materials Research》 |2010年第5期|p.899-909|共11页
  • 作者单位

    Department of Materials Science and Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore;

    Department of Materials Science and Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore;

    Department of Materials Science and Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore;

    Department of Materials Science and Engineering, Faculty of Engineering, National University of Singapore, Singapore 117574, Singapore;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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