Structural characterization of highly textured A1N thin films grown on titanium

摘要

A pulsed direct current (dc) reactive ion beam sputtering system has been used to synthesize highly c-axis oriented aluminum nitride (AlN) thin films on (0002)-oriented 200-nm thin titanium layers deposited on a Si-(111) substrate. After a systematic study of the processing variables, high-quality polycrystalline films with preferred c-axis orientation have been grown successfully on the Ti (0002) layer using an Al target under a N2/(N2 + Ar) ratio of 70%, a 2 mTorr processing pressure, and keeping the temperature of the substrate holder at ambient temperature (no substrate heating). The crystalline quality of the A1N and the underlaying Ti thin films was characterized by high-resolution x-ray diffraction. Best ω full width at half maximum values of the (0002) reflection for 1 -μm thin A1N layers are 0.56°. Hence, the A1N layers show a high degree of orientation in the (0002) direction, which directly translates into a high Q value piezoelectric response. Atomic force microscopy measurements were used to study the surface morphology of the Ti layer in an attempt to understand its impact on the quality of the A1N films deposited on top of them. Transmission electron microscopy cross-section analysis has been carried out to investigate the AlN/Ti interface. Our observations reveal the presence of crack-free layers with a smooth surface and extremely low defect density. Even local epitaxy phenomena have been identified at the AlN/Ti interface. The processing conditions used to synthesize A1N layers on Ti at room temperature are efficient in reducing the dislocation density and in-plane residual strain. Such AlN/Ti bilayers can be applied to manufacture novel electroacoustic device structures (such as bulk acoustic wave filters) on silicon substrates in further investigations.