Process and apparatus for producing epitaxially and/or highly texturally grown, high TC-oxide superconductor films, lacking in foreign phases, on substrates

摘要

The invention relates to a process for producing epitaxially and/or highly texturally grown, high Tc oxide superconductors fibres, with a low foreign phase on substrates, in which process an ablation process is initiated and maintained on a donor target by means of pulsed particle beams or laser beams and small droplets having diameters in the mu m range produced in this process reach the heated substrate, and also to an apparatus for carrying out the process. The object of the invention is to replace the EXIMER laser hitherto used for coating by less expensive and more effective lasers or electron beams. According to the invention, the object is achieved in that the substrate is held at a temperature at which the droplets wet the substrate on impact and solidify to form a uniform, smooth film. An apparatus particularly suitable for carrying out this process comprises an electron source which produces a pulsed electron beam with an electron energy of about 10-20 keV and a current density in the range from 103 to 104 A/cm2. …IMAGE…