首页> 外文期刊>Journal of Lightwave Technology >Birefringence free planar optical waveguide made by flame hydrolysis deposition (FHD) through tailoring of the overcladding
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Birefringence free planar optical waveguide made by flame hydrolysis deposition (FHD) through tailoring of the overcladding

机译:火焰水解沉积(FHD)通过调整外包层制成的无双折射平面光波导

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摘要

Stresses developing in a planar waveguide resulting from the different thermal expansion coefficients of the substrate and the three glass layers (buffer, core and cladding) were analyzed using a finite element method. It can be shown that mainly the thermal expansion of the overcladding determines the birefringence in the finished waveguide. Based on that result, recipes for an overcladding made with the flame-hydrolysis-deposit ion (FHD)-process were devised. We demonstrate the absence of birefringence in a commercial waveguide layer overclad with this glass. The high doping levels required for the cladding to have a thermal expansion coefficient sufficient for this raises concerns about the moisture sensitivity of such a glass. We examined the depth dependent composition of the glass using WD-ESCA (wavelength dispersive electron microprobe) and show, that at the surface a layer depleted of dopants is formed during the high temperature sintering process, This layer can serve as a protective coating to isolate the underlying, higher doped layer from the effects of moisture. Analysis of the stresses shows that this does not effect the birefringence behavior of the waveguide.
机译:使用有限元方法分析了由于基板和三个玻璃层(缓冲层,纤芯和覆层)的热膨胀系数不同而在平面波导中产生的应力。可以看出,主要是外包层的热膨胀决定了成品波导中的双折射。根据该结果,设计了通过火焰水解沉积离子(FHD)工艺制成的覆层配方。我们证明了在用这种玻璃覆盖的商业波导层中不存在双折射。包层具有足以为此目的的热膨胀系数所需的高掺杂水平引起了对这种玻璃的湿气敏感性的关注。我们使用WD-ESCA(波长色散电子探针)检查了玻璃的深度相关成分,并表明,在高温烧结过程中,表面上形成了一层掺杂剂耗尽层,该层可以用作隔离保护层受水分影响的底层较高掺杂层。应力分析表明,这不会影响波导的双折射行为。

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