Surface acoustic wave ammonia sensor based on ZnO/SiO_2 composite film

摘要

A surface acoustic wave (SAW) resonator with ZnO/SiO_2 (ZS) composite film was used as an ammonia sensor in this study. ZS composite films were deposited on the surface of SAW devices using the sol-gel method, and were characterized using SEM, AFM, and XRD. The performance of the sensors under ammonia gas was optimized by adjusting the molar ratio of ZnO:SiO_2 to 1:1,1:2 and 1:3, and the sensor with the ratio of ZnO to SiO_2 equaling to 1:2 was found to have the best performance. The response of sensor was 1.132 kHz under 10 ppm NH_3, which was much higher than that of the sensor based on a pristine ZnO film. Moreover, the sensor has good selectivity, reversibility and stability at room temperature. These can be attributed to the enhanced absorption of ammonia and unique surface reaction on composite films due to the existence of silica.