Patent Issued for Barrier Structure and Nozzle Device for Use in Tools Used to Process Microelectronic Workpieces with One Or More Treatment Fluids

摘要

2013 MAR 20 (VerticalNews) -- By a News Reporter-Staff News Editor at Journal of Engineering --nAccording to news reporting originating from Alexandria, Virginia, by VerticalNews journalists, a patent bynthe inventors Collins, Jimmy D. (Allen, TX); DeKraker, David (Burnsville, MN); Gast, Tracy A. (Waconia,nMN); Rose, Alan D. (Wylie, TX), filed on June 20, 2007, was cleared and issued on March 5, 2013.