Large Scale Production of Indium Antimonide Film for Position Sensors in Automobile Engines

摘要

We use low pressure MOVPE to grow indium antimonide films on groups of eight 3 inch GaAs wafers per run. The films are used for the production of magne-toresistive position sensors for the car industry. To meet the narrow specifica-tions for automotive components, the standard deviation of the sheet resistivity, and the thickness of the films have been reduced below 1.5%. This uniformity is the result of an optimization process encompassing the determination of the best susceptor temperature and the optimum flow. The gas velocity was found to have a large impact on the uniformity of the layers. Rotation of the wafers and the use of an optimum gas velocity results in extremely uniform layers.