Textured Ion-Beam Assisted Deposition: Magnesium Oxide Template on Non-Metallic Flexible Ceraflex for Epitaxial Growth of Perovskite Films

摘要

This paper reports on a systematic study of the development of bi-axially textured magnesium oxide (MgO) templates on flexible ceramic polycrystalline ceraflex substrates by ion-beam assisted deposition (IBAD) and the preliminary test of the growth of YBa2Cu3O7 on top. The rough surface of the original ceraflex, with a typical roughness of about 100 nm, presented a serious challenge in the development of textured IBAD-MgO. By a coating of multiple layers of spin-on-glass (SOG), the surface roughness has been reduced to about a few nanometers. After an amorphous Y2O3 buffer had been deposited on multilayer SOG coated ceraflex, IBAD-MgO and homo-epitaxial MgO were grown with good in-plane texture of Δ $phi$ ～ 9.3° An epitaxial SrTiO3 film was subsequently deposited on this textured template with in-plane Δ $phi$ ～ 10.8° Finally, an epitaxial YBa2Cu3O7 superconducting film was grown on LaMnO3 buffered and IBAD-MgO textured ceraflex, and AC susceptibility examination indicated the transition temperature was 88 K. The results have demonstrated that an IBAD-MgO textured template on ceraflex can be used for the epitaxial growth of perovskite films.