Study of the chemcially activated sublimation of ZnSe

摘要

The reactions and processes involved in the growth of ZnSe by chemcially activated sublimation in a H_2 atmosphere are studied. The rate of transport as a function of source and substrate tempertures and the difference between them are determined from close spacing vapour transport experimets. According to this process, ZnSe layers are deposited on sapphire substrates by short distance chemcially assisted sublimation. The experimental results are analysed and the thermodynamic constants of the transport are determiend using a theoretical model for kinetically controlled pocesses, assuming water to act as sublimationcatalyst. A preliminary optical and structural characterisation of the layers has also been performed.