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首页> 外文期刊>Journal of Crystal Growth >InAs_(0.3)Sb_(0.7) films grown on (100) GaSb substrates with a buffer layer by liquid-phase epitaxy
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InAs_(0.3)Sb_(0.7) films grown on (100) GaSb substrates with a buffer layer by liquid-phase epitaxy

机译:通过液相外延在具有缓冲层的(100)GaSb衬底上生长InAs_(0.3)Sb_(0.7)薄膜

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摘要

The growth of InAs_xSb_(1-x) films on (100) GaSb substrates by liquid-phase epitaxy (LPE) has been investigated and epitaxial InAs_(0.3)Sb_(0.7) films with InAs_(0.91)Sb_(0.09) buffer layers have been successfully obtained. The low X-ray rocking curve FHWM values of InAs_(0.3)Sb_(0.7) layer shows the high quality of crystal-orientation structure. Hall measurements show that the highest electron mobility in the samples obtained is 2.9 x 10~4cm~2 V~(-1) s~(-1) and the carrier density is 2.78 x 10~(16)cm~(-3) at room temperature (RT). The InAs_(0.3)Sb_(0.7) films grown on (100) GaSb substrates exhibit excellent optical performance with a cut-off wavelength of 12 μm.
机译:已经研究了通过液相外延(LPE)在(100)GaSb衬底上生长InAs_xSb_(1-x)薄膜的过程,并且具有InAs_(0.91)Sb_(0.09)缓冲层的外延InAs_(0.3)Sb_(0.7)薄膜具有已成功获得。 InAs_(0.3)Sb_(0.7)层的低X射线摇摆曲线FHWM值显示出高质量的晶体取向结构。霍尔测量表明,所获得样品中的最高电子迁移率为2.9 x 10〜4cm〜2 V〜(-1)s〜(-1),载流子密度为2.78 x 10〜(16)cm〜(-3)在室温(RT)下。在(100)GaSb衬底上生长的InAs_(0.3)Sb_(0.7)膜具有出色的光学性能,截止波长为12μm。

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