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机译:氮化物MOCVD反应器中热电偶位置对温度场的影响
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Shandong Provincial Key Laboratory of Network based Intelligent Computing, Jinan, 250022, School of Information Science and Engineering, University of Jinan, 250022,Shandong, China;
Key Lab. of Fundamental Science for National Defense on Wide Band-Cap Semiconductor Technology, School of Microelectronics, Xidian University Xidian University, Xi'an 710071;
Key Lab. of Fundamental Science for National Defense on Wide Band-Cap Semiconductor Technology, School of Microelectronics, Xidian University Xidian University, Xi'an 710071;
Key Lab. of Fundamental Science for National Defense on Wide Band-Cap Semiconductor Technology, School of Microelectronics, Xidian University Xidian University, Xi'an 710071;
A1. electromagnetic field; A1. finite element analysis; A1. induction heat; A1.MOCVD; A1. temperature field;
机译:感应加热氮化物MOCVD反应器温度场的优化和有限元分析
机译:感应加热氮化物MOCVD反应器温度场的优化与有限元分析
机译:氮化物垂直MOCVD反应器的大型基座上晶片的温度均匀性
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机译:GaN-MOCVD反应器温度场的有限元分析与优化
机译:BmDO-aasERT:III族氮化物半导体纳米结构研究mOCVD生长和高温,高载流子密度和微裂纹激光效应的新特征