Initial stage of liquid phase heteroepitaxy of III-V ternary alloys

摘要

The initial stage of liquid phase heteroepitaxy (LPHE) of the III-V ternary alloys from the supercooled dilute liquid solutions, taking into account the lattice mismatch between the epitaxial layer and substrate, is considered. The non- equilibrium epitaxial process is described by the minimum condition of the Helmholtz free energy of the heterogeneous system. The affinities of formation reactions of the binary compounds constituting the III-V ternary alloys are equal to one another at the heteroepitaxial growth. The compositional dependencies of the In_xGa_1-xP alloys grown from the 10 deg C supercooled liquid solutions on the temperature are demonstrated.