Growth of copper‐nickel alloy films suitable for use as substrates

摘要

The structure of copper‐nickel alloy films grown via simultaneous deposition on air‐cleaved rocksalt has been studied by transmission electron microscopy. The epitaxial temperature of the alloy films was determined as a function of composition. Alloy films grown and annealed at 350 °C exhibited a relatively high density (∼ 1 × 1010/cm2) of twins. The twin density could be reduced to ∼ 1 × 108/cm2 through growth of the alloy film at 540 °C followed by a 10‐min anneal at this temperature.