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Spatially resolved lifetime measurements in neutron‐transmutation‐doped polycrystalline silicon

机译:中子掺杂多晶硅的空间分辨寿命测量

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Spatially resolved carrier lifetimes have been measured at the same grain boundary using a series of adjacent samples doped to different levels by neutron transmutation. The samples had dopant concentration levels between 1013 and 1017 atoms/cm3. The carrier lifetime was measured using a contactless microwave absorption technique to monitor the decay of photoconductivity which allowed us to perform either isothermal or isochronal annealing to remove the damage caused by irradiation. An optimum anneal of 30 min at 700 °C resulted in almost full recovery to the lifetime before irradiation. A short laser pulse of wavelength 900 nm was focused to a 0.3‐mm‐diam spot on the samples. Lifetimes of two different sets of carriers were measured, the bulk carrier lifetime at the center of a grain and the carrier lifetime at a grain boundary. This latter carrier lifetime involves both fast and slow recombination mechanisms. The slow decay mechanism is due to interface states at the grain boundary. The fast recombination lifetime was found to be of the same order as the bulk recombination lifetime (of the order of 1 μs) and the slow one was of the order of 1 ms. Doping levels up to 1016 atoms/cm3 show no significant effect on the measured bulk carrier lifetime.
机译:通过使用中子trans杂掺杂到不同水平的一系列相邻样品,在相同晶界处测量了空间分辨的载流子寿命。样品的掺杂剂浓度水平在1013和1017原子/ cm3之间。使用非接触微波吸收技术测量载流子寿命,以监测光电导率的衰减,这使我们能够进行等温或等时退火,以消除由辐照引起的损害。在700°C的温度下进行30分钟的最佳退火后,几乎可以完全恢复到辐照前的寿命。将波长为900 nm的短激光脉冲聚焦到样品上0.3 mm直径的光斑上。测量了两组不同载流子的寿命,散装载流子的寿命在晶粒的中心,载流子的寿命在晶界。后一载流子寿命涉及快速和慢速重组机制。缓慢的衰减机制是由于晶界处的界面状态。发现快速重组寿命与本体重组寿命相同数量级(约为1μs),而较慢的重组寿命约为1 ms。高达1016原子/ cm3的掺杂水平对测量的载流子寿命没有显着影响。

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    《Journal of Applied Physics》 |1986年第5期|P.1681-1688|共8页
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  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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