Cathodoluminescence of aluminum ceramic compounds

摘要

We compare in this study the differences in cathodoluminescence spectra of aluminum-based materials. AlN and Al2O3 materials respond differently when subjected to 10 keV charging electron beam. In order to understand the underlying physics, we carried out a parametric study (annealing treatment, temperature, radiation dose, and supplier). Tests have been performed at temperatures ranging from about 150 K to 300 K, with a monoenergetic electron beam at 10 keV, and electron flux density equal to 1 mu A cm(-2). Cathodoluminescence intensity is shown to be highly dependent on temperature, synthesis conditions, thermal annealing treatments, dose, and dose rate. The air-annealing treatment at high temperature increases considerably the concentration of surface defects. We have also been able to demonstrate a significant evolution of cathodoluminescence spectra with the injected radiation dose. These different evolutions have been analyzed in regard to material structure and composition. Published under license by AIP Publishing.