A triple crystal x-ray topography technique with sample and analyzer mesh scans has been used to obtain micron resolution lattice orientation and strain maps of a single crystal silicon microcantilever. Both free and slightly bent states of the cantilever have been studied. The results show ～8 mdeg twist between the cantilever and the supporting base, 0.3 m radius of anticlastic curvature, and strain on the order of -2 X 10~(-5) in the direction of surface normal.
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机译：具有样品和分析仪网格扫描的三晶体X射线形貌技术已用于获得单晶硅微悬臂梁的微米分辨率晶格取向和应变图。悬臂的自由状态和轻微弯曲状态都已被研究。结果表明，悬臂与支撑基座之间的扭曲度约为8 mdeg，抗弹曲率半径为0.3 m，在表面法线方向上的应变约为-2 X 10〜（-5）。
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