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Invariant x-ray elastic constants and their use in determining hydrostatic stress

机译:不变的X射线弹性常数及其在确定静水压力中的用途

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摘要

The measurement of stress using x-ray diffraction requires knowledge of the constitutive equation linking strain and stress for the sample under investigation. With the exception of single-crystal materials, a unique constitutive relation does not exist requiring an average over the diffracting ensemble. Such averaging techniques provide bounds to the range of x-ray elastic constants, whose values depend on the elastic anisotropy of the material, the mechanical response of the crystallites and often the x-ray reflection chosen. In fact, for materials possessing cubic symmetry, the general x-ray stress equation can be reduced to a form that relates the measured strain to the hydrostatic stress and the bulk modulus, quantities that are invariant with respect to crystal orientation. These orientations do not correspond to stress-free values but rather to lattice parameters that are independent of the x-ray reflection used. Examples include the application of this technique to a test case of an isotropic, biaxially stressed film, and determining the triaxial stress states in capped features. The validity of these orientations, which are developed for specific stress states, relies on the assumption that the poly crystalline aggregate behaves as a quasi-isotropic ensemble.
机译:使用X射线衍射测量应力需要了解将被测样品的应变和应力联系起来的本构方程。除单晶材料外,不存在唯一的本构关系,需要对整个衍射系进行平均。这种平均技术为X射线弹性常数的范围提供了界限,其值取决于材料的弹性各向异性,微晶的机械响应以及通常选择的X射线反射。实际上,对于具有立方对称性的材料,可以将一般X射线应力方程式简化为一种形式,该形式将测得的应变与静水压力和体积模量(相对于晶体取向不变的量)相关联。这些方向不对应于无应力值,而是对应于与所使用的X射线反射无关的晶格参数。示例包括将该技术应用于各向同性双轴应力膜的测试案例,以及确定封盖特征中的三轴应力状态。针对特定应力状态开发的这些方向的有效性取决于多晶聚集体表现为准各向同性集合体的假设。

著录项

  • 来源
    《Journal of Applied Physics》 |2011年第12期|p.123501.1-123501.8|共8页
  • 作者

    Conal E. Murray;

  • 作者单位

    IBM TJ. Watson Research Center, Yorktown Heights, New York 10598;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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