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Measurement of thin films using very long acoustic wavelengths

机译:使用非常长的声波波长测量薄膜

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摘要

A procedure for measuring material thickness by means of necessarily long acoustic wavelengths is examined. The approach utilizes a temporal phase lag caused by the impulse time of wave momentum transferred through a thin layer that is much denser than its surrounding medium. In air, it is predicted that solid or liquid layers below approximately 1/2000 of the acoustic wavelength will exhibit a phase shift with an arctangent functional dependence on thickness and layer density. The effect is verified for thin films on the scale of 10 /an using audible frequency sound (7 kHz). Soap films as thin as 100 nm are then measured using 40 kHz air ultrasound. The method's potential for imaging applications is demonstrated by combining the approach with near-field holography, resulting in reconstructions with sub-wavelength resolution in both the depth and lateral directions. Potential implications at very high and very low acoustic frequencies are discussed.
机译:检验了通过必要的长声波波长测量材料厚度的过程。该方法利用了由通过比其周围介质致密得多的薄层传递的波动量的脉冲时间引起的时间相位滞后。预计在空气中,低于声波波长的1/2000的固体或液体层将显示出相移,其反正切函数取决于厚度和层密度。使用可听频率的声音(7 kHz)对规模为10 / an的薄膜验证了该效果。然后使用40 kHz空气超声测量厚度为100 nm的肥皂膜。通过将该方法与近场全息术相结合,证明了该方法在成像领域的潜力,从而可以在深度和横向两个方向上实现亚波长分辨率的重建。讨论了在非常高和非常低的声学频率下的潜在含义。

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  • 来源
    《Journal of Applied Physics》 |2013年第23期|234904.1-234904.8|共8页
  • 作者单位

    University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan;

    University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan;

    University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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