机译:从等离子体增强化学气相沉积过程中的硅烷监测中得出的实用硅沉积规则
Ecole Polytechnique Federate de Lausanne (EPFL), Institute of Microengineering (IMT), Photovoltaics and Thin-Film Electronics Laboratory, Rue de la Maladiere 71b, 2000 Neuchatel, Switzerland;
Ecole Polytechnique Federate de Lausanne (EPFL), Institute of Microengineering (IMT), Photovoltaics and Thin-Film Electronics Laboratory, Rue de la Maladiere 71b, 2000 Neuchatel, Switzerland;
Ecole Polytechnique Federate de Lausanne (EPFL), Institute of Microengineering (IMT), Photovoltaics and Thin-Film Electronics Laboratory, Rue de la Maladiere 71b, 2000 Neuchatel, Switzerland;
Ecole Polytechnique Federate de Lausanne (EPFL), Institute of Microengineering (IMT), Photovoltaics and Thin-Film Electronics Laboratory, Rue de la Maladiere 71b, 2000 Neuchatel, Switzerland;
University of Patras, Department of Chemical Engineering, Plasma Technology Laboratory, P.O. Box 1407, 26504 Patras, Greece;
University of Patras, Department of Chemical Engineering, Plasma Technology Laboratory, P.O. Box 1407, 26504 Patras, Greece;
机译:利用Urbach能量与硅烷耗竭率之间的关系优化通过超高频等离子体增强化学气相沉积法沉积的本征氢化非晶硅
机译:在低基板温度下通过等离子体增强化学气相沉积和热线化学气相沉积沉积的薄膜的机械和压阻特性
机译:以单甲基硅烷为硅源的等离子体化学气相沉积薄膜沉积硅结合的类金刚石碳
机译:用于晶体光伏太阳能电池的柔性多晶金属基板上的异质外延硅薄膜:物理气相沉积与等离子体增强化学气相沉积之间的比较
机译:通过远程等离子体增强化学气相沉积沉积非晶硅和硅基电介质:在制造TFT和MOSFET中的应用
机译:CVD石墨烯上等离子增强化学气相沉积法制备的无转移反型石墨烯/硅异质结构
机译:通过等离子体增强的化学气相沉积和硅化物 - 包层硅电极形成的相关方法选择性沉积硅化钛膜