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Evidence of a rolling motion of a microparticle on a silicon wafer in a liquid environment

机译:液体环境中硅晶片上微粒滚动运动的证据

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摘要

The interaction of micro- and nanometer-sized particles with surfaces plays a crucial role when small-scale structures are built in a bottom-up approach or structured surfaces are cleaned in the semiconductor industry. For a reliable quantification of the interaction between individual particles and a specific surface, however, the motion type of the particle must be known. We developed an approach to unambiguously distinguish between sliding and rolling particles. To this end, fluorescent particles were partially bleached in a confocal laser scanning microscope to tailor an optical inhomogeneity, which allowed for the identification of the characteristic motion pattern. For the manipulation, the water flow generated by a fast moving cantilever-tip of an atomic force microscope enabled the contactless pushing of the particle. We thus experimentally evidenced a rolling motion of a micrometer-sized particle directly with a fluorescence microscope. A similar approach could help to discriminate between rolling and sliding particles in liquid flows of micro-fluidic systems.
机译:当小尺寸结构以自下而上的方式构建或清洁半导体工业中的结构化表面时,微米级和纳米级粒子与表面的相互作用起着至关重要的作用。但是,为了可靠地量化单个粒子与特定表面之间的相互作用,必须知道粒子的运动类型。我们开发了一种明确区分滑动粒子和滚动粒子的方法。为此,将荧光颗粒在共聚焦激光扫描显微镜中进行了部分漂白,以调节光学不均匀性,从而可以识别出特征运动模式。为了进行操作,原子力显微镜快速移动的悬臂尖端产生的水流实现了粒子的非接触式推动。因此,我们直接用荧光显微镜实验证明了微米级颗粒的滚动运动。类似的方法可以帮助区分微流体系统的液体流动中的滚动粒子和滑动粒子。

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  • 来源
    《Journal of Applied Physics》 |2016年第19期|194304.1-194304.6|共6页
  • 作者单位

    Physics of Surfaces, Center of Smart Interfaces and Institute of Materials Science, Technische Universitaet Darmstadt, Alarich-Weiss-Str. 10, 64287 Darmstadt, Germany;

    Membrane Dynamics, Department of Biology, Technische Universitaet Darmstadt, Schnittspahnstrasse 3, 64287 Darmstadt, Germany;

    Physics of Surfaces, Center of Smart Interfaces and Institute of Materials Science, Technische Universitaet Darmstadt, Alarich-Weiss-Str. 10, 64287 Darmstadt, Germany;

    Physics of Surfaces, Center of Smart Interfaces and Institute of Materials Science, Technische Universitaet Darmstadt, Alarich-Weiss-Str. 10, 64287 Darmstadt, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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