Sensitivity on materials optical properties of single beam torsional Casimir actuation

摘要

Here, we investigate the dynamical sensitivity of electrostatic torsional type microelectromechanical systems (MEMS) on the optical properties of interacting materials. This is accomplished by considering the combined effect of mechanical Casimir and electrostatic torques to drive the device actuation. The bifurcation curves and the phase portraits of the actuation dynamics have been analyzed to compare the sensitivity of a single beam torsional device operating between materials with conductivities that differ by several orders of magnitude. It is shown that the range of stable operation of torsional MEMS against stiction instabilities can increase by decreasing the conductivity of interacting materials. Moreover, the introduction of controlled dissipation, corresponding to a finite quality factor, in an otherwise unstable torsional system, could alter an unstable motion towards stiction to dissipative stable motion.