IR laser-induced co-decomposition of trisilane and thiirane for deposition of polycarbosilthiane films

Josef Pola; Marketa Urbanova; Magna Santos; Luis Diaz; Jan Subrt

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IR laser-induced co-decomposition of trisilane and thiirane for deposition of polycarbosilthiane films

机译：红外激光诱导的甲硅烷和硫杂环丙烷共分解以沉积聚碳硅锡薄膜

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TEA CO_2 laser irradiation of gaseous trisilane-thiirane mixtures results in the co-decomposition of both components and allows chemical vapor deposition of polycarbosilthiane films that undergo reaction with air moisture, evolve H_2S and develop to polyc

机译：气态三硅烷-硫杂环丁烷混合物的TEA CO_2激光辐照导致两种组分的共分解，并允许化学气相沉积聚碳硅锡薄膜，该薄膜与空气中的水分发生反应，释放出H_2S，并发展为聚

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来源
《Journal of Analytical & Applied Pyrolysis》 |2008年第2期|p.225-230|共6页
作者
Josef Pola; Marketa Urbanova; Magna Santos; Luis Diaz; Jan Subrt;
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作者单位

Laboratory of Laser Chemistry, Institute of Chemical Process Fundamentals, Academy of Sciences of the Czech Republic, 16502 Prague, Czech Republic;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类物理化学（理论化学）、化学物理学;
关键词
co-decomposition; trisilane; thiirane; laser-induced polymers; silicon sulfide; polycarbosilthiane; polycarbosiloxane;

机译：共分解;三硅烷;硫杂环丁烷;激光诱导的聚合物;硫化硅;聚碳硅ian;聚碳硅氧烷;
入库时间 2022-08-18 03:02:02

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2. IR laser-induced co-decomposition of gaseous trisilane and carbon disulfide [J] . Josef Pola, Dana Pokorna, Jan Subrt, Journal of Analytical & Applied Pyrolysis . 2008,第2期

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3. IR laser-induced decomposition in thiirane for gas-phase deposition of conjugated organosulfur polymer incorporating cycloheptasulfur [J] . Jadranka Blazevska-Gilev, Marketa Urbanova, Dana Pokorna, Journal of Analytical & Applied Pyrolysis . 2012,第Jana期

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4. The properties of GaN films grown by plasma assisted laser-induced chemical vapour deposition, and the influence of heavy ion irradiation [C] . Afifuddin, A., Butcher, . 2000

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5. Laser-induced chemistry: A. Infrared laser probing of reactions products. B. Laser-assisted deposition of thin films. [D] . Simianu, Valerian Constantin. 1995

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机译：红外CO 2激光脉冲对乙硅烷的激光诱导击穿光谱

IR laser-induced co-decomposition of trisilane and thiirane for deposition of polycarbosilthiane films

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