MgTiO_3 (003) Thin Film Deposited on Sapphire (0001) by Sputtering

摘要

This work demonstrates the epitaxy of ilmenite magnesium ti-tanate (MgTiO_3) thin films on c-plane sapphire. MgTiO_3 thin film with a (003) preferred-orientation was obtained by adjusting the substrate temperature, annealing temperature, and annealing time; (111)-preferring spinel Mg_2TiO_4 was found when magnesium titanate thin films were deposited at room temperature and then postannealed. X-ray diffraction was used to identify the orientation and quality of the crystal, providing information that is useful in elucidating the epitaxial relationships between the MgTiO_3/sapphire and Mg_2TiO_4/sapphire interfaces. The optical properties of the MgTiO_3 were measured, and (003)-prefer-ring MgTiO_3, was found to be a good candidate for optical applications.