Rapid resist ashing by slot-excited atmospheric pressure microwave O_2 plasma

摘要

Using a slot-type atmospheric-pressure O-2 microwave plasma produced by a travelling microwave and a slot on the waveguide, novolak polymer resist ashing was investigated. An increase of the gas flow speed drastically enhanced the resist ashing rate and a 3?mmin(?1) ashing rate was obtained. The ashing temperature was measured and a low sample temperature of less than 400K was confirmed. The result suggests the capability of producing very high ashing speeds under atmospheric pressure and low substrate temperatures using atmospheric pressure microwave O-2 plasma.