Crack-Free High-Aspect-Ratio Drilling of Glasses by 1μm Yttrium Aluminum Garnet Laser and Translucent Adhesive Tape

摘要

We have succeeded in drilling a crack-free high-aspect-ratio hole through glass using a YAG laser of 1 μm wavelength, 5 ns pulse width and 30-630 mJ/pulse. The hole is 25.5mm long with 500 μm radius and no crack is observed even under atmospheric conditions. This success is due to the use of a translucent adhesive tape pasted on the glass surface in which the temperature is controlled and thermal stress is reduced. Computer simulation revealed the mechanism of the phenomena.