Proposal of Solidly Mounted Resonator Type Functional Devices

摘要

New device configurations using a solidly mounted piezoelectric thin film resonator (SMR) are proposed. In addition to the piezoelectric layer for the excitation of vibration, an additional piezoelectric layer is added in the SMR. The additional piezoelectric layer functions as an electric coupler. The resonant frequency of the SMR can be electrically adjusted through the coupler. The filter configuration using the SMR with the coupler is proposed. Moreover, the possibility of fabricating a chip type SMR device is considered. Simulation results for the proposed devices are presented.