Embedded Nanowire Network Growth and Node Device Fabrication for GaAs-Based High-Density Hexagonal Binary Decision Diagram Quantum Circuits

摘要

The basic feasibility of constructing hexagonal binary decision diagram (BDD) quantum circuits on GaAs-based selectively grown (SG) nanowires was investigated from viewpoints of electrical connections through embedded nanowires and electrical uniformity of devices formed on nanowires. For this, < 110 > - and < 510 > -oriented nanowires and hexagonal network structures combining these nanowires were formed on (001) GaAs substrates by selective molecular beam epitaxy (MBE) growth. The width and vertical position of the nanowires could be controlled by growth conditions for both < 110 > - and < 510 > -directions. By current-voltage (Ⅰ-Ⅴ) measurements, good electrical connection was confirmed at the node point where vertical alignment of embedded GaAs nanowire pieces was found to be important. SG quantum wire (QWR) switches formed on the nanowires showed good gate control over a wide temperature range with clear conductance quantization at low temperatures. Good device uniformities were obtained on the test chips, providing a good prospect for future integration. BDD node devices using SG QWR switches showed clear path switching characteristics. Estimated power-delay product values were very small, confirming the feasibility of ultra low-power operation of future circuits.