Noise Analysis of Si-Based Planar-Type Ion-Channel Biosensors

摘要

A micropore with a diameter of 50-100 μm was formed, which penetrated a silicon on insulator (SOI) substrate and a Teflon substrate. The single-ion-channel current of gramicidin A (g-A) was measured for the planar lipid bilayer with reconstructed g-A formed in this micropore. The background noise in the SOI substrate was almost at an equivalent level to that in the Teflon substrate. It can be concluded from the noise analysis that a noise characteristic of the same level as that of the Teflon substrate or the glass substrate can be achieved for the Si substrate by controlling the substrate structure in the vicinity of the micropore with a wide range of pore diameters.