Millimeter-Wave GaAs Surface Micromachined Bandpass Filters Using the External Quality Factor

摘要

In this paper, millimeter-wave bandpass filters with λ_g/4 short stubs made by surface micromachining on a GaAs substrate are presented. These filters show flexible bandwidth by variation of the position of the short stub using the external quality factor, Q_e without changing the impedance value at millimeter-wave range. The bandpass filters can be realized with a wide (50%) or narrow (10%) bandwidth simply by adjusting the positions of the short stubs. They show insertion losses of 2.3 and 6.8 dB, and return losses of 15 and 16dB, respectively at a center frequency of 60GHz.