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Discharge-Mode Transition in Jet-Type Dielectric Barrier Discharge Using Argon/Acetone Gas Flow Ignited by Small Helium Plasma Jet

机译:小氦等离子体射流激发的氩气/丙酮气流在喷射型介质阻挡放电中的放电模式转变

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摘要

A discharge-mode transition in a jet-type dielectric barrier discharge (DBD) was triggered by a small fraction of acetone vapor added to an argon (Ar) gas flow at atmospheric pressure. In order to trigger a stable discharge in the Ar/acetone gas flow with a relatively small applied voltage, we used an additional small plasma jet using a He gas flow on the side of the main flow. The transition from filamentary to glow like discharge modes took place upon increasing the acetone-vapor ratio, with the transition occurring at an acetone content of approximately 0.3 vol %. We compared discharge currents, optical emission spectra, and deposited materials on the substrate in each discharge mode to characterize the discharge phenomena. The experimental results clearly indicate that the characteristics of the jet-type DBD show nonlinear dependence on the acetone-vapor ratio, especially around the transition to the discharge mode. It was also found by microscopic observations that the surface morphologies of the deposited materials were completely different in the filamentary and glow like modes.
机译:喷射型介电势垒放电(DBD)中的放电模式转变是由在大气压下添加到氩气(Ar)气流中的一小部分丙酮蒸气触发的。为了在相对较小的施加电压下触发Ar /丙酮气流中的稳定放电,我们在主流侧使用了He气流的附加小等离子体射流。从丝状到辉光状的放电模式的转变发生在增加丙酮-蒸气比时,其中丙酮含量约为0.3体积%时发生转变。我们比较了每种放电模式下的放电电流,发射光谱和在基板上沉积的材料,以表征放电现象。实验结果清楚地表明,喷射型DBD的特性显示出对丙酮-水蒸气比的非线性依赖性,尤其是在过渡到排放模式附近。通过显微镜观察还发现,沉积材料的表面形态在丝状和发光状模式中完全不同。

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  • 来源
    《Japanese journal of applied physics》 |2011年第11issue1期|p.000162-000172|共11页
  • 作者单位

    Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan;

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