Simulation of solidly mounted plate wave resonator with wide bandwidth using 0-th shear horizontal mode in LiNbO3 plate

摘要

A cognitive radio system using a vacant frequency band of digital TV channels (TV white space) requires a tunable filter with wide tunable ranges of center frequency and bandwidth. An ultra-wideband resonator is a key device to implement the tunable filter, because the tunable range is limited by the bandwidth (BW) of the resonators. A 0-th shear horizontal (SH0) mode plate wave resonator using an ultra-thin LiNbO3 plate is known to have a large electromechanical coupling factor, i.e., a large BW, but the structural fragility of the ultra-thin LiNbO3 plate is problematic. In this study, the feasibility of solidly mounted resonator type SH0 mode plate wave resonator was investigated systematically by finite element method simulation. The design parameters including the Euler angle, thickness of a LiNbO3 plate, and the material and thickness of an interdigital transducer were optimized. With the best design, a BW as wide as 26% is obtained. (C) 2015 The Japan Society of Applied Physics