Low pressure micro-Joule picosecond laser-induced breakdown spectroscopy and its prospective applications to minimally destructive and high resolution analysis

摘要

A time-resolved spectroscopic study is performed by using 125-500 micro-Joule (mu J) ps laser focused directly without the aid of microscope on a Cu plate sample in a variety of low-pressure ambient gases including air, helium and argon. It is shown that the ultrashort mu J laser-induced low-pressure plasma in Ar ambient gas exhibits the typical characteristics of shock wave plasma responsible for the thermal excitation and sharp emission of the analyte atoms. It is found that the highest signal to background (S/B) ratio of about 100 is achieved in 1.3 kPa argon ambient gas and detected with optical multichannel analyzer (OMA) gate delay of 1 ns and gate width of 50 mu s. The emission spectra obtained from pure Zn sample show the effective suppression of the ionic emission with ablation energy around and below 500 mu J. The experimental setup is successfully applied to Cr analysis with low detection limit in steel. In particular, its application to C analysis in steel is demonstrated to resolve the long standing problem of overlapping contributions from the neutral and ionic Fe emission. It is further found that an element of high excitation energy such as fluorine (F) can be clearly detected from a non metal teflon sample. Further, its application to alluminum sample containing various concentrations of Mg, Ca, Fe, and Si impurity elements clearly displays the existence of linear calibration lines promising for quantitative analyses in certain dynamical ranges. Finally, in view of the tiny crater sizes of less than 10 mu m diameter created by the very low ps laser energy, this technique is promising for micrometer resolution mapping of elemental distribution on the sample surface and its depth profiling. (C) 2017 The Japan Society of Applied Physics